Electrostatic comb-drive actuator with high in-plane translational velocity
Eltagoury, Y.M.; Soliman, M.; Sabry, Y.M.; Alotaibi, M.J.; Khalil D;
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| Title | Electrostatic comb-drive actuator with high in-plane translational velocity | Authors | Eltagoury, Y.M.; Soliman, M.; Sabry, Y.M.; Alotaibi, M.J.; Khalil D | Issue Date | 2016 | Journal | Micromachines | DOI | 10.3390/mi7100188 | Scopus ID | 2-s2.0-84994887677 |
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